One-Step Synthesis of Microdome Patterns for Microstructured Pressure Sensors with Ultra-High Sensing Performance
2021
Tang, Zhen-Hua | Xue, Shan-Shan | Li, Yuan-Qing | Zhu, Zi-Cai | Huang, Pei | Fu, Shao-Yun
Pressure sensors usually suffer from a trade-off between sensitivity and the linear sensing range, which may be improved by manipulating the geometric microstructure of active sensing materials via the molding strategy, standard photolithography technique, and so on. However, these conventional microengineering techniques require specialized equipment, which are extremely complicated, high-cost, and time-consuming to manufacture. Herein, a mold-free, scalable, low-cost, and environment-friendly one-step thermofoaming strategy is proposed to fabricate surface morphology-tunable microdome-patterned composites (MPCs). The microstructured pressure sensor is then prepared by coating the MPCs with highly conductive graphene. Remarkably, the as-prepared pressure sensor presents a better overall sensing performance compared to the previous pressure sensors prepared using complicated microengineering methods. Moreover, an electromechanical response model and finite-element analysis are used to clarify the sensing mechanisms of the present microstructured pressure sensor. Furthermore, several successful application demonstrations are conducted under various pressure levels. Considering the advantages of the one-step fabrication strategy over conventional surface microengineering techniques and the high performance of the microstructured pressure sensor, the present pressure sensor has promising potential applications in health monitoring, tactile sensation, wearable devices, etc.
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