High-resolution thermal micro-imaging using europium chelate luminescent coatings
2017
Benseman, Timothy M. | Hao, Yang | Vlasko-Vlasov, Vitalii K. | Welp, Ulrich | Koshelev, Alexei E. | Kwok, Wai-Kwong | Divan, Ralu | Keiser, Courtney | Watanabe, Chiharu | Kadowaki, Kazuo
Micro-electronic devices often undergo significant self-heating when biased to their typical operating conditions. This paper describes a convenient optical micro-imaging technique which can be used to map and quantify such behavior. Europium thenoyltrifluoroacetonate (EuTFC) has a 612 nm luminescence line whose activation efficiency drops strongly with increasing temperature, due to T-dependent interactions between the Eu3+ ion and the organic chelating compound. This material may be readily coated on to a sample surface by thermal sublimation in vacuum. When the coating is excited with ultraviolet light (337 nm) an optical micro-image of the 612 nm luminescent response can be converted directly into a map of the sample surface temperature. This technique offers spatial resolution limited only by the microscope optics (about 1 micron) and time resolution limited by the speed of the camera employed. It offers the additional advantages of only requiring comparatively simple and non-specialized equipment, and giving a quantitative probe of sample temperature.
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