AGRIS - International System for Agricultural Science and Technology

Catalyzed Atomic Layer Deposition of Silicon Oxide at Ultralow Temperature Using Alkylamine

2018

Mayangsari, Tirta R. | Park, Jae-Min | Yusup, Luchana L. | Gu, Jiyeon | Yoo, Jin-Hyuk | Kim, Heon-Do | Lee, Won Jun


Bibliographic information
Langmuir
Volume 34 Issue 23 Pagination 6660 - 6669 ISSN 1520-5827
Publisher
American Chemical Society
Other Subjects
Lewis bases; Process monitoring; Triethylamine; Trimethylamine; Density functional theory
Language
English
Type
Text; Journal Article

2024-02-28
MODS
Data Provider
Lookup at Google Scholar
If you notice any incorrect information relating to this record, please contact us at agris@fao.org