AGRIS - International System for Agricultural Science and Technology

Reactive Distillation-Aided Ultrapure Silane Production from Trichlorosilane: Process Simulation and Optimization

2017

Li, Xue-Gang | Huang, Xun | Xiao, Wen-De


Bibliographic information
Industrial & engineering chemistry process design and development
Volume 56 Issue 7 Pagination 1731 - 1738 ISSN 1520-5045
Publisher
American Chemical Society
Other Subjects
Process design; Silane; Condensers
Language
English
Type
Text; Journal Article

2024-02-28
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