AGRIS - International System for Agricultural Science and Technology

Elucidating the Surface Reaction Mechanisms During Atomic Layer Deposition of LixAlySizO by in Situ Fourier Transform Infrared Spectroscopy

2016

Cho, Jea | Kim, Taeseung | Seegmiller, Trevor | Chang, Jane P.


Bibliographic information
The Journal of Physical Chemistry C
Volume 120 Issue 22 Pagination 11837 - 11846 ISSN 1932-7455
Publisher
American Chemical Society
Other Subjects
Physical chemistry; Fourier transform infrared spectroscopy; Aluminum oxide; Reaction mechanisms; Annealing
Language
English
Type
Text; Journal Article

2024-02-28
MODS
Data Provider
Lookup at Google Scholar
If you notice any incorrect information relating to this record, please contact us at agris@fao.org