Bilayer graphene synthesis by plasma treatment of copper foils without using a carbon-containing gas
2014
Katō, Ryūichi | Tsugawa, Kazuo | Okigawa, Yuki | Ishihara, Masatou | Yamada, Takatoshi | Hasegawa, Masataka
Bilayer graphene has been synthesized by using hydrogen plasma treatment of copper foils for 30s at the temperature of 850°C together with joule-heating treatment of the foils without using a carbon-containing gas such as methane in order to suppress the nucleation density of graphene. The effect of plasma provides active species of carbon atoms on copper substrate and a selective bilayer graphene formation of AB-stacking in a very short time. Carbon to be precipitated is delivered from the copper foil and/or the environment in the reaction chamber. The domain size of synthesized graphene, the controllability of a few layers and the electrical conductivity have been significantly improved compared with plasma chemical vapor deposition (CVD) using carbon-containing gas. The sheet resistance of bilayer graphene exhibits 951Ω in average. The carrier mobility shows 1000cm²/Vs in maximum at room temperature. The sheet resistance of 130±26Ω has been attained after the doping by gold chloride solution.
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