Metal-Organic Chemical Vapor Deposition in a Transmission Electron Microscope
2024
Jacobsson Daniel | Tornberg Marcus | Maliakkal Carina B. | Wallenberg Reine | Dick Kimberly A.
Bibliographic information
BIO Web of Conferences
Volume
129
Pagination
08020
ISSN
2117-4458
Publisher
EDP Sciences
Other Subjects
Semiconductor; Mocvd; Etem; In-situ
Language
English
2024-12-11
2024-12-13
DOAJ
Data Provider
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