Crystallization process and electro-optical properties of In2O3 and ITO thin films
2006
Adurodija, Frederick Ojo | Semple, Lynne | Brüning, Ralf
Amorphous indium oxide (In₂O₃) and 10-wt% SnO₂ doped In₂O₃ (ITO) thin films were prepared by pulsed-laser deposition. These films were crystallized upon heating in vacuum at an effective heating rate of 0.00847 °C/s, while the evolution of the structure was observed by in situ X-ray diffraction measurements. Fast crystallization of the films is observed in the temperature ranges 165–210 °C and 185–230 °C for the In₂O₃ and ITO films, respectively. The crystallization kinetics is described by a reaction equation, with activation energies of 2.31 ± 0.06 eV and 2.41 eV and order of reactions of 0.75 ± 0.07 and 0.75 for the In₂O₃ and ITO films, respectively. The structures of the films observed here during heating are compared with those obtained upon film growth at different temperatures. The resistivity of the films depends on the evolution of the structure, the oxygen content and the activation of tin dopants in the films. A low resistivity of 5.5 × 10⁻⁴ Ω cm was obtained for the In₂O₃ and ITO films at room temperature, after annealing to 250 °C the resistivity of the ITO film reduces to 1.2 × 10⁻⁴ Ω cm.
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