Application of in situ chloride-generated route to Ti₅Si₃ nanowires from and on Si substrate
2012
Yu, Leshu | Lv, Yingying | Zhang, Xiaolan | Wang, Huizhen
Most titanium silicide one-dimensional (1D) nanostructures have been thus far prepared by using titanium chloride as precursor which is very sensitive to air and very inconvenient to the experimental operations. Herein Ti₅Si₃ nanowires were synthesized on bare Si substrate via in situ chloride-generated route, and the shortcomings from the direct use of titanium chloride were well avoided. Furthermore, the Si substrate functions as both Si source and substrate; thus, the synthesis and potential integration of titanium silicide nanostructures on a mature silicon substrate is accomplished by one step. In this way the as-synthesized Ti₅Si₃ nanowires on Si substrate showed promising field-emission behavior.
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