Substrate effects on the CVD growth of MoS2 and WS2
2020
Yin, Hang | Zhang, Xudong | Lu, Jiangwei | Geng, Xuemin | Wan, Yanfen | Wu, Mingzai | Yang, Peng
Chemical vapor deposition (CVD)-grown 2D materials like MoS₂ and WS₂ have been widely used for research and application. Here, we study substrates’ effects on CVD-grown MoS₂ and WS₂. The morphology, crystalline quality and optical properties have been modified while changing substrates, which can be derived from lattice matching between 2D materials and substrate, defect/impurities on the interface and conductance/transparency of different substrates. The results provide suggestion for further study in CVD growth of 2D materials and device fabrications.
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