High Cu-Cu Bonding Strength Achievement Using Micron Copper Particles Under Formic Acid Atmosphere
2025
Bofu Li | Yinyin Luo | Dejian Li | Dameng Li | Baobin Yang | Baoliang Gong | Shunfeng Han | Siliang He | Miao Cai
This study demonstrates the achievement of robust Cu-Cu bonding strength through thermocompression bonding (TCB) under a formic acid (FA) atmosphere. When subjected to sintering at 300 °:C for 1 min under FA, sintering joints exhibit an average shear strength of 50.9 MPa. This strength further increases to an average of 131 MPa when the sintering duration is extended to 20 min at the same temperature under FA. Molecular dynamics simulations are employed to model the sintering behavior of copper particles of various sizes and thus understand the diffusion mechanism. The analysis of mean square displacement (MSD) and radial distribution function from these simulations suggests that the presence of small particles aids in the sintering of large ones. A copper paste, formulated by mixing micron-sized copper particles with organic solvents, is utilized in a series of experiments to explore different sintering methodologies aimed at enhancing the mechanical integrity of the sintering joints while simultaneously addressing issues associated with copper particle oxidation. Innovative strategies, including redox processes, are applied to improve the shear strength of the sintering joints and to minimize the detrimental effects of oxidation on the copper particles. Results indicate that preoxidation, which was used to form a nano surface structure, and using an FA atmosphere, remarkably enhance the shear strength of the Cu-Cu joints created via TCB. The findings of this research are pivotal for the advancement of rapid Cu-Cu bonding techniques using micron-scale copper pastes and can have profound implications for the development of future electronic packaging and interconnection technologies.
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