Application of plasma catalysis system for C4F8 removal

2021

Chen, Ya Sheng | Pan, Kuan Lun | Chang, Moo Been


书目信息
Environmental science and pollution research
28 41 页码 57619 - 57628 ISSN 0944-1344
出版者
Springer Berlin Heidelberg
其它主题
Water vapor; Electric potential difference
语言
英语
类型
Journal Article; Text

2024-02-28
MODS