Accordion structured porous silicon membranes: Application to contamination detection of organic volatile by FTIR spectroscopy

Cavalaglio, S.; L., Robert; Gauthier-Manuel, B.

Accordion structured porous silicon membranes: Application to contamination detection of organic volatile by FTIR spectroscopy

2011

Cavalaglio, S. | L., Robert | Gauthier-Manuel, B.

We report here the design of a new three-dimensional structured porous silicon membrane having an accordion shape by anodizing of anisotropic KOH etched silicon wafer. A complete process is described and an application example as contamination detection of organic volatile by FTIR spectroscopy is proposed.

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