Semi-transparent quaternary oxynitride photoanodes on GaN underlayers
2020
Ma, Zili | Piętak, Karolina | Piątek, Jędrzej | Reed DeMoulpied, Justin | Rokicińska, Anna | Kuśtrowski, Piotr | Dronskowski, Richard | Zlotnik, Sebastian | Coridan, Robert H. | Slabon, Adam
Conformal atomic layer deposition (ALD) technique is employed to make semi-transparent TaOₓNy, providing the possibility to build semi-transparent oxy(nitride) heterojunction photoanodes on conductive substrates. A generalized approach was developed to manufacture semi-transparent quaternary metal oxynitrides on conductive substrates beyond semi-transparent binary Ta₃N₅ photoanodes aiming for wireless tandem photoelectrochemical (PEC) cells.
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